Bu sistem firmanın şu ana kadar en çok tercih edilen sistemi olmuştur detayları şu şekildedir.
The nB3 is a generation ahead of the current competition and with its field-proven performance has gained acceptance in the market place. It has excellent stability and has demonstrated an average uptime of greater than 93%. NanoBeam now introduces the nB4 which has been developed to further reduce delivery times and service costs.
nB4 development aims:
Specification comparison:
nB3 |
nB4 |
|
Beam Voltage range |
30kV - 100kV |
20kV - 100kV |
Feature size on resist |
<8nm |
<8nm |
Metal lift-off line width |
20nm |
20nm |
Stitching/overlay error |
<25nm for 500um field |
<20nm for 500um field |
Required regular service for |
Average of 3 years |
Expected |
XY stage |
2 years |
> 5 years |
optical column |
6 years |
> 10 years |
loading robot |
2 years |
> 5 years |
The nB4 system will provide a platform for further development to high deflection speed and further integrated electronics.
Daha fazla bilgiye firma sayfalarından ulaşabilirsiniz.
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